Multi-channel, high-density, ultra-low capacitance arrays for ESD and surge protection

A novel protection device providing ultra-low line capacitance and improved ESD (J. E. Vinson et al., 2003) and surge capability is presented. Applications include stand-alone protection arrays and integrated protection in baseband- or RF-filters. A proprietary epitaxial layer and isolation capability enable high levels of surge power handling capability, while keeping line capacitance low and reducing device footprint. The response of the device to ESD and surge stresses is investigated at wafer- and package-level. Process condition variations and derived structures are studied, along with a consideration of issues related to the measurement of capacitance, ESD and surge capability.