Modal analysis of MEMS using ultrasonic base excitation

Author

Kehrberg, Steven ; Wellner, Patrick ; Geckeler, Carsten ; Mehner, Jan

Author_Institution

Automotive Electron., Robert Bosch GmbH, Reutlingen, Germany

fYear

2012

fDate

20-23 March 2012

Firstpage

1

Lastpage

4

Abstract

We developed a new test facility based on the principle of piezoelectric base excitation in order to meet the requirements for modal analysis of a micromachined angular rate sensor at very high frequencies. A combination of a 0.5 mm thin piezoelectric disc, a seismic mass and a damping element mounted in a vacuum chamber results in a linear frequency response over the whole frequency range from 10 to 200 kHz. Therefore the test facility is particularly suitable for the analysis of mechanical nonlinearities of microelectromechanical systems (MEMS).

Keywords

excited states; micromechanical devices; modal analysis; piezoelectric materials; MEMS; linear frequency response; microelectromechanical systems; micromachined angular rate sensor; modal analysis; piezoelectric base excitation; ultrasonic base excitation; Couplings; Frequency measurement; Frequency response; Micromechanical devices; Springs; Steel; Test facilities; MEMS; base excitation; experimental modal analysis; piezoelectric disc;

fLanguage

English

Publisher

ieee

Conference_Titel

Systems, Signals and Devices (SSD), 2012 9th International Multi-Conference on

Conference_Location

Chemnitz

Print_ISBN

978-1-4673-1590-6

Electronic_ISBN

978-1-4673-1589-0

Type

conf

DOI

10.1109/SSD.2012.6198033

Filename

6198033