DocumentCode
2055168
Title
Monte Carlo simulation of film morphology of carbon overcoat
Author
Ma, Xiaoding ; Stirniman, Michael ; Gui, Jing
Author_Institution
Seagate Technol. LLC, Fremont, CA, USA
fYear
2003
fDate
March 30 2003-April 3 2003
Abstract
In this paper, we describe carbon film morphology under different deposition conditions using Monte Carlo simulation.
Keywords
Monte Carlo methods; carbon; sputter deposition; thin films; C; Monte Carlo simulation; carbon film morphology; sputter deposition; Atomic layer deposition; Chemical technology; Degradation; Lattices; Magnetic films; Magnetic recording; Protection; Substrates; Surface morphology; Tribology;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7647-1
Type
conf
DOI
10.1109/INTMAG.2003.1230816
Filename
1230816
Link To Document