Structural properties of transparent Tb-doped TiO2 thin films

Author

Wojcieszak, Damian ; Kaczmarek, Danuta ; Domaradzki, Jaroslaw ; Borkowska, Agnieszka

Author_Institution

Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Warsaw

fYear

2007

fDate

8-10 July 2007

Firstpage

87

Lastpage

89

Abstract

Doping of TiO₂ with various metal ions can modify its different properties. In this work, structural properties of transparent Tb-doped TiO₂ thin films have been outlined. Thin films were deposited by high energy reactive magnetron sputtering (HE RMS) from metallic Ti-Tb target on Si and SiO₂ substrates. Thin films were investigated by means of energy disperse spectrometry (EDS), X-ray diffraction (XRD), atomic force microscopy (AFM) and optical transmission method. From EDS measurements Tb content in prepared thin films was determined to be 0.4 at. %, 2 at. % and 2.6 at. %. XRD analysis revealed the existence of crystalline TiO₂ in the form of anatase and rutile, depending on Tb amount in examined samples. AFM images showed nanocrystalline structure of prepared thin films. Optical transmission studies showed that Tb-doped thin films are transparent to visible light. Also, the slight red shift of the fundamental absorption edge of TiO₂ was observed with Tb doping.

Keywords

X-ray chemical analysis; X-ray diffraction; absorption coefficients; atomic force microscopy; doping; red shift; semiconductor materials; semiconductor thin films; sputter deposition; sputtered coatings; terbium; titanium compounds; transparency; visible spectra; Si; SiO₂; TiO₂:Tb; X-ray diffraction; anatase; atomic force microscopy; doping; energy disperse spectrometry; fundamental absorption edge; nanocrystalline structure; optical transmission; reactive magnetron sputtering; red shift; rutile; transparent thin films; Atom optics; Atomic force microscopy; Doping; Helium; Optical films; Optical microscopy; Semiconductor thin films; Spectroscopy; Sputtering; X-ray scattering;

fLanguage

English

Publisher

ieee

Conference_Titel

Photonics and Microsystems, 2007 International Students and Young Scientists Workshop on

Conference_Location

Dresden

Print_ISBN

978-1-4244-1313-3

Electronic_ISBN

978-1-4244-1314-0

Type

conf

DOI

10.1109/STYSW.2007.4559133

Filename

4559133