Tens Femtogram Resoluble Piezoresistive Cantilever Sensors with Optimized High-Mode Resonance Excitation

Ultra-sensitive mass sensor is demanded for bio/chemical molecular detection. A piezoresistive resonant cantilever sensor with optimized is developed with an optimized electromagnetic excitation for high-mode flexure resonance. In our experiment, it has been proved that the quality factor of the resonant sensor can be improved by this optimized high-mode resonance exciting technique. Experimental results have shown that the optimized excitation for the resonant cantilever sensor can effectively improve the mass-sensing resolution to 29fg, thereby, improving the bio/chemical sensor performance.