Fabrication of Three Dimensional Micro Devices by Means of Two Photon Photopolymerization

With the rapid progress of ultra short laser technology, two photon photopolymerization(TTP) has been introduced into the domain of microfabrication. Its characterization and process are described in this paper as well as its experimental system. Through the relevant experiments, we optimized the spatial resolution of this method. Under the fine focusing, we obtain the minimum line width of 0.65 mum, which has broken the diffraction limit. Finally, we have presented some microstructures fabricated by this technique, which illustrate its practicability in fabricating micro and nanostructures efficiently.