Double Matched Microgyro Resonant System in Drive and Sense Modes

The working principle of Micromechanical Resonator is introduced by using control theory. The Q of the MEMS resonator is very important under different vacuum condition. Theoretically, the sense mode motion is amplified by the mechanical quality factor of the sense mode when the two frequencies are closely matched. To achieve a high stability driving not only at the aspect of resonance frequency but also at its amplitude. An intelligent Double Matched Resonance system based on DSP chip and DDS combined techniques is presented and a design frame for a new type intelligent closed-loop drive generator is proposed. The interface method in digital circuitry part and the weak signal detection technique in analogy circuitry part are analyzed in detail. Combined with closed-loop experiment data and scanning curves, several frequency searching approaches in different vacuum circumstance are presented. After automatic sweeping to their resonance frequency, a number of MEMS z-axis rate gyroscope can work in excellent stability.