DocumentCode
2058031
Title
A silicon microactuator using integrated microfabrication technology
Author
Lu, Y. ; Yang, J.P. ; Chen, J. ; Chen, S.X.
Author_Institution
Data Storage Inst., Singapore, Singapore
fYear
2003
fDate
March 30 2003-April 3 2003
Abstract
In this paper, a silicon electrostatic microactuator is developed using the proposed MEMS technologies with integrated head element fabrication processing in disk drive industry.
Keywords
elemental semiconductors; magnetic heads; microactuators; silicon; MEMS method; Si; integrated head element fabrication; integrated microfabrication; silicon microactuator; Magnetics; Microactuators; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7647-1
Type
conf
DOI
10.1109/INTMAG.2003.1230940
Filename
1230940
Link To Document