A single-domain 26 nm-pitch pattern for the X-Y quantum dot media template

Author

Sakurai, Masatoshi

Author_Institution

Corp. Res. & Dev. Center, Toshiba Corp., Kawasaki, Japan

Volume

2

fYear

2003

fDate

12-14 Aug. 2003

Firstpage

596

Abstract

Guided self-assembly patterns for a template of the X-Y type quantum dot storage media were investigated. By adjusting the length of polystyrene-poly methyl methacrylate (PS-PMMA) block copolymer chains and relative volume fractions, the pitch of the phase-separated hexagonal-packing PMMA dots structure was 26 nm. This corresponds to the recording density of 1.1 tera bit per square inch. Phase diagram with respect to the polymer size and the fraction ratio is presented. Guide structures for aligning the self-ordering patterns were prepared using the nanoimprint process. Equilateral triangle guides were found to be suitable for the hexagonal-packed self-ordering structure. A single-domain hexagonal-packing structure was formed with each crystal axis parallel to the side of the triangle.

Keywords

nanolithography; phase diagrams; phase separation; polymer blends; quantum dots; self-assembly; 26 nm; X-Y quantum dot media template; crystal axis; fraction ratio; hexagonal packing structure; nanoimprint process; phase diagram; phase separation; polymer size; polystyrene-poly methyl methacrylate block copolymer chains; quantum dot storage media; recording density; relative volume fractions; self ordering patterns; single domain hexagonal packing structure; single domain pitch pattern; Costs; Magnetic recording; Magnetic separation; Nanostructures; Polymer films; Quantum dots; Self-assembly; Signal to noise ratio; Thermal stability; US Department of Transportation;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on

Print_ISBN

0-7803-7976-4

Type

conf

DOI

10.1109/NANO.2003.1230981

Filename

1230981