Experiment Research on Multi-Folded-Suspension Resonators

Author

Zhao, Jiang M. ; Chen, Xiao Y. ; Zhang, Alice H X ; Zheng, Yan P.

Author_Institution

Dept. of Mech. Autom., Shanghai Univ.

fYear

2006

fDate

18-21 Jan. 2006

Firstpage

1316

Lastpage

1321

Abstract

Experiment researches on multi-folded-suspension resonators are made by four kinds of resonators with different structure parameters. It is found that the resonance amplitude can be about 10 micron in open air by a peak to peak 48V AC driving voltage without DC bias voltages. And a non-transverse resonance has been observed in the experiment. It is found that the frequencies of AC voltage are just a half of the resonators´ natural frequencies when the resonances take place without DC offset voltages. And the resonance amplitude is the second power function of the AC voltage. The experiment results reveal that the transverse resonance frequency meets the ANSYS simulation result very well, but the non-transverse resonance frequencies does not agree with the results by the ANSYS simulation results

Keywords

micromechanical resonators; suspensions (mechanical components); ANSYS simulation; driving voltage; multi-folded-suspension resonators; transverse resonance frequency; Automation; Dielectric constant; Differential equations; Electrostatics; Fingers; Resonance; Resonant frequency; Suspensions; Systems engineering and theory; Voltage; Experiment; Multi-folded-suspension; Resonance Amplitude; Resonance Frequency; Resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Conference_Location

Zhuhai

Print_ISBN

1-4244-0139-9

Electronic_ISBN

1-4244-0140-2

Type

conf

DOI

10.1109/NEMS.2006.334739

Filename

4135187