Research on Permanent Magnet linear Synchronous Motors Driver for Micro-fabrication

Thrust ripple such as side force, slot force and normal force is key factor which affects the properties of permanent magnet linear synchronous motors (PMLSM). Furthermore, model uncertainties and disturbances greatly affect the PMLSM´s motion properties too. Side force was greatly decreased by optimizing the length of the PMLSM mover, and slot force caused by slot effect was greatly reduced by using fraction slot structure, and normal force was calculated though finite element method. Then the uniform formula of Thrust ripple was obtained through Fourier series nonlinear regress. To model uncertainties and disturbances, a global-stable nonlinear position controller was introduced to the PMLSM driver. Then a lyapunov function was constructed to verify the stability of the designed controller. Experiment shows that the positioning accuracy of the PMLSM driver can reach about the accuracy of the position sensor resolution (1mum). So the PMLSM feeding platform can be applied to the production of micro-fluidic chips, and it can be easily introduced to other fields just replacing a position sensor with corresponding resolution