DocumentCode
2060902
Title
Correlation between nanocavity shrinkage with preferential amorphisation via ultrafast interaction
Author
Zhu, Xianfang ; Wang, Zhanguo
Author_Institution
Dept. of Phys., Xiamen Univ., China
fYear
2004
fDate
20-25 Sept. 2004
Firstpage
247
Lastpage
251
Abstract
We model the recent experimental results and demonstrate that the internal shrinkage of nanocavities in silicon is intrinsically associated with preferential amorphization as induced by self-ion irradiation. The paper reveals novel thermodynamic nonequilibrium properties of such an open-volume nanostructure in condensed matter and also of covalently bound amorphous materials both at nanosize scale and during ultrafast process.
Keywords
amorphisation; elemental semiconductors; high-speed optical techniques; ion beam effects; microcavities; nanostructured materials; silicon; solid-state phase transformations; Si; nanocavity shrinkage; preferential amorphisation; self-ion irradiation; thermodynamic nonequilibrium; ultrafast interaction; Amorphous materials; Annealing; Atomic measurements; Laboratories; Nanomaterials; Semiconductor materials; Shape; Silicon; Temperature; Thermodynamics;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconducting and Insulating Materials, 2004. SIMC-XIII-2004. 13th International Conference on
Print_ISBN
0-7803-8668-X
Type
conf
DOI
10.1109/SIM.2005.1511429
Filename
1511429
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