• DocumentCode
    2061380
  • Title

    Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever

  • Author

    Kauppinen, Lasse J. ; Abdulla, Shahina M C ; Krijnen, Gijs J M ; Pollnau, Markus ; De Ridder, René M.

  • Author_Institution
    Integrated Opt. Microsyst. (IOMS) Group, Univ. of Twente, Enschede, Netherlands
  • fYear
    2011
  • fDate
    22-26 May 2011
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    We demonstrate, for the first time, the use of a monolithically integrated silicon nitride cantilever for tuning a silicon microring resonator over a 50 pm wavelength range by applying 8.5V, without affecting the ring´s Q-factor.
  • Keywords
    Q-factor; cantilevers; integrated optics; micro-optomechanical devices; micromechanical resonators; optical resonators; optical tuning; silicon compounds; silicon-on-insulator; Q-factor; Si; Si3N4; electromechano-optically tuned ring resonator; monolithically integrated microcantilever; silicon microring resonator; silicon nitride cantilever; silicon-on-insulator; voltage 8.5 V; wavelength 50 pm; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
  • Conference_Location
    Munich
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0533-5
  • Electronic_ISBN
    Pending
  • Type

    conf

  • DOI
    10.1109/CLEOE.2011.5942720
  • Filename
    5942720
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2061380