• DocumentCode
    2062191
  • Title

    Papers

  • fYear
    2010
  • fDate
    9-11 Dec. 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Start of the above-titled section of the conference proceedings record.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Fundamental Problems of Micro/Nanosystems Technologies (MNST), 2010 IEEE 2nd Russia School and Seminar on
  • Conference_Location
    Novosibirsk
  • Print_ISBN
    978-1-4244-5962-9
  • Type

    conf

  • DOI
    10.1109/MNST.2010.5687141
  • Filename
    5687141