Adaptive run to run control for intermittent batch operations

Author

Qin, Joe S. ; Scheid, Glen W. ; Riley, Terrence J.

Author_Institution

Texas Univ., Austin, TX, USA

Volume

3

fYear

2002

fDate

2002

Firstpage

2168

Abstract

Process reproducibility is a challenging problem in semiconductor manufacturing as the component size shrinks and the manufacturing complexity increases. This paper proposes a new adaptive run-to-run controller for intermittent batch operations and applies it to a rapid thermal annealing (RTA) process at Advanced Micro Devices (AMD). The adaptive controller has a self-monitoring component and requires little process knowledge to set up. The success of the controller is demonstrated on an AST SHS 2800 RTA system.

Keywords

adaptive control; batch processing (industrial); computerised monitoring; integrated circuit manufacture; process control; rapid thermal annealing; AMD; AST SHS 2800 RTA system; Advanced Micro Devices; adaptive run-to-run controller; intermittent batch operations; manufacturing complexity; process reproducibility; rapid thermal annealing process; self-monitoring component; semiconductor manufacturing; Adaptive control; Control systems; Large scale integration; Manufacturing processes; Optimal control; Programmable control; Rapid thermal annealing; Rapid thermal processing; Reproducibility of results; Semiconductor device manufacture;

fLanguage

English

Publisher

ieee

Conference_Titel

American Control Conference, 2002. Proceedings of the 2002

ISSN

0743-1619

Print_ISBN

0-7803-7298-0

Type

conf

DOI

10.1109/ACC.2002.1023958

Filename

1023958