An approach to improve the precision of the grating interferometer measurement

Author

Li, Shuqiu ; Liu, Shufen ; Xia, Liang ; Zheng, Wanbo ; Wang, Xiaoyan

Author_Institution

Coll. of Comput. Sci. & Technol., Jilin Univ., Changchun, China

fYear

2008

fDate

22-25 Nov. 2008

Firstpage

639

Lastpage

641

Abstract

A grating interferometer may be applied to measure the distance of equipment moving. However, some characteristics and process techniques of grating interferometer restrict the measurement precision to get improved. Based on an overall review of model and a method of subdivision and thorough analysis of the factors influencing measurement precision, this paper proposes an approach to improve measurement precision: 160 subdivision of MCS51 single chip micro computer. With the application to grating interferometer, this approach is proved to be more feasible and reliable by table-checking.

Keywords

computerised instrumentation; diffraction gratings; interferometers; microprocessor chips; MCS51 single chip micro computer; equipment moving; grating interferometer measurement; measurement precision:; table-checking; Application software; Circuits; Computer applications; Educational institutions; Frequency measurement; Gratings; Phase measurement; Position measurement; Semiconductor device measurement; Signal analysis; grating; interferometer; subdivision;

fLanguage

English

Publisher

ieee

Conference_Titel

Computer-Aided Industrial Design and Conceptual Design, 2008. CAID/CD 2008. 9th International Conference on

Conference_Location

Kunming

Print_ISBN

978-1-4244-3290-5

Electronic_ISBN

978-1-4244-3291-2

Type

conf

DOI

10.1109/CAIDCD.2008.4730647

Filename

4730647