Research of piezoelectric micro angle drive and close-loop control system

Author

Ma, Tingting ; Qi, Yongyue ; Zhao, Meirong

Author_Institution

State Key Lab. of Precision Meas. Technol. & Instrum., Tianjin Univ., Tianjin, China

fYear

2011

fDate

16-18 Dec. 2011

Firstpage

2036

Lastpage

2039

Abstract

The piezoelectric micro angle driving mechanism, based on Inchworm motion, is presented. The deformation of piezoelectric ceramic is magnified through flexible hinge structure and finally output the angle displacement. The driving mechanism ultimately completes precision rotation. Driver module through the digital signal processor (DSP) produces square wave and triangle wave, which is amplified for the driving signal of piezoelectric ceramic provide by driver power. The angular displacement is detected through circular grating and transformed the control signal, then which is delivered to DSP. Signal is feedback to PID closed-loop control system, and output signal is further adjusted. So the resolution and localization accuracy of drive displacement is improved.

Keywords

closed loop systems; deformation; digital signal processing chips; feedback; microactuators; piezoceramics; piezoelectric motors; three-term control; DSP; PID closed-loop control system; angle displacement; circular grating; digital signal processor; drive displacement localization accuracy; drive displacement resolution; flexible hinge structure; inchworm motion; piezoelectric ceramic deformation; piezoelectric microangle drive; square wave; triangle wave; Actuators; Ceramics; Clamps; Digital signal processing; Fasteners; Gratings; Circular grating; Flexible hinge structure; Inchworm motion; PID closed-loop control; Piezoelectric micro-angle motor;

fLanguage

English

Publisher

ieee

Conference_Titel

Transportation, Mechanical, and Electrical Engineering (TMEE), 2011 International Conference on

Conference_Location

Changchun

Print_ISBN

978-1-4577-1700-0

Type

conf

DOI

10.1109/TMEE.2011.6199616

Filename

6199616