A new position sensor for high-speed measurement of multiple points

A high-speed measuring system of multiple points is becoming an important issue in many industrial applications. Therefore, the development of a high-speed position sensor is an important issue. However, conventional sensors such as CCD(charge-coupled device) and PSD(position-sensitive detector) are insufficient to apply to the high-speed measurement of multiple points. We propose a new position sensor for high-speed measurement of multiple points. The proposed sensor features a single scanning detecting method of multiple points by parallel processing technique and design of the sensor by analog circuitry, which makes high-speed measurement of multiple points possible. The designed sensor system realizes both high-speed performance and high accuracy