DocumentCode
2084869
Title
Some features of Monte-Carlo methods usage for IC manufacturing technological operation simulation
Author
Tesluk, Vasyl ; Granat, Petro ; Korbetskyy, Orest ; Koval, Volodymyr Y.
Author_Institution
Lviv Polytech. Nat. Univ., Ukraine
fYear
2001
fDate
12-17 Feb. 2001
Firstpage
132
Abstract
The mathematical models, based on Monte-Carlo method were developed for taking for account decreasing of geometrical sizes of integral devices.
Keywords
Monte Carlo methods; semiconductor process modelling; IC manufacturing; Monte Carlo method; mathematical model; technological operation simulation; Application specific integrated circuits; Etching; Histograms; Integrated circuit modeling; Ion implantation; Kernel; Mathematical model; Solid modeling; Testing; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
CAD Systems in Microelectronics, 2001. CADSM 2001. Proceedings of the 6th International Conference. The Experience of Designing and Application of
Conference_Location
Lviv-Slavsko, Ukraine
Print_ISBN
966-553-079-8
Type
conf
DOI
10.1109/CADSM.2001.975783
Filename
975783
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