DocumentCode
2091762
Title
Effects of DC sputtering power on the properties of AZO films deposited at room temperature for CIGS photovoltaics
Author
Yuandong Li ; Demiao Wang ; Jingping Lu ; Hao Jin ; Jian Zhou
Author_Institution
Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou, China
fYear
2012
fDate
7-10 Nov. 2012
Firstpage
1
Lastpage
3
Abstract
Al:ZnO(AZO) films were deposited on glass substrate at different sputtering power. Effects of sputtering power on the properties of AZO films were investigated. And the electro-optical property of the AZO films gets optimum at 330W.
Keywords
II-VI semiconductors; aluminium; copper compounds; electro-optical effects; gallium compounds; indium compounds; semiconductor growth; semiconductor thin films; solar cells; sputter deposition; ternary semiconductors; wide band gap semiconductors; zinc compounds; AZO film properties; Al:ZnO films; CIGS photovoltaics; CuInGaSe2; DC sputtering power effects; SiO2; ZnO:Al; electro-optical property; glass substrate; power 330 W;
fLanguage
English
Publisher
ieee
Conference_Titel
Communications and Photonics Conference (ACP), 2012 Asia
Conference_Location
Guangzhou
ISSN
2162-108X
Print_ISBN
978-1-4673-6274-0
Type
conf
Filename
6510718
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