A miniaturized SNOM sensor based on the optical feedback inside the VCSEL cavity

Author

Gorecki, Christophe ; Heinis, Dominique ; Benkelfat, Badr-Eddine

Author_Institution

LOPMD-IMFC, Univ. de Franche-Comte, Besancon, France

fYear

2003

fDate

18-21 Aug. 2003

Firstpage

61

Lastpage

62

Abstract

An integrated architecture for SNOM sensor is proposed. The basic design consists of a transparent cantilever with a VCSEL bonded by flip-chip beneath the metalized tip. An aperture in the metalization layer at the apex is illuminated by the VCSEL and the light beam back reflected is detected with a detector integrated on the back of the VCSEL. The study also presents excellent quality optical images, demonstrating the performance of SNOM sensor and justifying the interest of integrated architecture.

Keywords

integrated optics; laser cavity resonators; laser feedback; micro-optics; microsensors; near-field scanning optical microscopy; optical design techniques; optical images; optical sensors; surface emitting lasers; VCSEL cavity; integrated architecture; metalization layer; miniaturized SNOM sensor; optical feedback; optical images; transparent cantilever; Apertures; Detectors; Face detection; Head; Optical feedback; Optical microscopy; Optical sensors; Optical surface waves; Threshold current; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2003 IEEE/LEOS International Conference on

Print_ISBN

0-7803-7830-X

Type

conf

DOI

10.1109/OMEMS.2003.1233467

Filename

1233467