• DocumentCode
    2094020
  • Title

    Photonic crystal waveguide characterisation for MEMS applications

  • Author

    Salt, Martin G. ; Maerki, I. ; Gautsch, S. ; Schaedlin, F. ; Staufer, U. ; Herzig, H.P.

  • Author_Institution
    Inst. of Microtechnol., Neuchatel Univ., Switzerland
  • fYear
    2003
  • fDate
    18-21 Aug. 2003
  • Firstpage
    109
  • Lastpage
    110
  • Abstract
    This work deals with the performance of silicon photonic crystal waveguides (∼ 1.55 μm). Initial results are presented and concepts for future MEMS-based devices are introduced.
  • Keywords
    elemental semiconductors; micro-optics; micromechanical devices; optical testing; optical waveguide theory; photonic crystals; silicon; MEMS applications; MEMS-based devices; photonic crystal waveguide; silicon photonic crystal waveguides; Biomembranes; Dispersion; Interference; Micromechanical devices; Optical filters; Optical losses; Optical reflection; Optical waveguides; Photonic crystals; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2003 IEEE/LEOS International Conference on
  • Print_ISBN
    0-7803-7830-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2003.1233490
  • Filename
    1233490
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2094020