DocumentCode
2094520
Title
Electrostatic MEMS variable optical attenuator with folded micromirror
Author
Lim, Tae-Sun ; Ji, Chang-Hyeon ; Oh, Chang-Hoon ; Yee, Youngjoo ; Bu, Jong Uk
Author_Institution
MS Group, LG Electron. Inst. of Technol., Seoul, South Korea
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
143
Lastpage
144
Abstract
A reflection type VOA with folded micromirror was designed and fabricated. The proposed mirror structure can reduce the size of device by parallel alignment of the two fibers. Lensed fibers are used for high coupling efficiency and ease of assembly. The initial insertion loss is about 0.6 dB and the maximum attenuation is about 30 dB. The switching time of the fabricated VOA is about 1 ms.
Keywords
electrostatic actuators; lenses; micromirrors; optical attenuators; optical design techniques; optical fabrication; optical fibre couplers; optical fibre losses; optical switches; MEMS; VOA; coupling efficiency; electrostatic variable optical attenuator; folded micromirror; insertion loss; lensed fibers; optical design; optical fabrication; Assembly; Electrostatics; Insertion loss; Micromechanical devices; Micromirrors; Mirrors; Optical attenuators; Optical fiber devices; Optical losses; Optical reflection;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233507
Filename
1233507
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