DocumentCode
2094757
Title
Biaxial MEMS raster scanner with linear ramp drive
Author
Urey, Hakan ; Sprague, Randy
Author_Institution
KOC Univ., Istanbul, Turkey
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
161
Lastpage
162
Abstract
A biaxial MEMS raster scanner is developed for laser scanning displays. We discuss microfabrication, packaging, and design aspects, and how to minimize power consumption and linearity error by optimizing the vertical scanner resonant frequency and drive waveform.
Keywords
micro-optics; microassembling; micromechanical devices; optical design techniques; optical fabrication; optical scanners; packaging; waveform generators; biaxial MEMS raster scanner; design aspects; laser scanning displays; linear ramp drive; microfabrication; packaging; vertical scanner resonant frequency; Coils; Copper; Displays; Energy consumption; Glass; Magnets; Micromechanical devices; Mirrors; Packaging; Resonant frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233516
Filename
1233516
Link To Document