Moving fringe detection for ultra precision position measurement

Author

Yi, Jong Hoon ; Kim, Jong Ahn ; Kim, Soohyun ; Kwak, Yoon Keun

Author_Institution

Dept. of Mech. Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea

Volume

2

fYear

2000

fDate

2000

Firstpage

723

Abstract

A novel method for the measurement of precision position using an interferometer is proposed This method is to detect the fringe movement of interferograms from the fringe peak positions, which is linearly related to the displacement of an object. The error analysis and simulation were carried out considering the speckle noise, the Gaussian noise and the wavefront distortions. The results of simulation show that this method is effective for the measurement of precision position. An experiment was implemented for verifying this method

Keywords

Gaussian noise; error analysis; light interferometry; measurement errors; position measurement; speckle; Gaussian noise; defocus error; error analysis; fringe peak positions; interferograms; interferometer; moving fringe detection; object displacement; signal processing algorithm; simulation; speckle noise; ultra precision position measurement; wavefront distortions; Charge coupled devices; Distortion measurement; Gaussian noise; Interference; Laser beams; Mirrors; Optical filters; Optical interferometry; Position measurement; Signal processing algorithms;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 2000. IMTC 2000. Proceedings of the 17th IEEE

Conference_Location

Baltimore, MD

ISSN

1091-5281

Print_ISBN

0-7803-5890-2

Type

conf

DOI

10.1109/IMTC.2000.848831

Filename

848831