• DocumentCode
    2095695
  • Title

    Highly-sensitive optical waveguide sensor based on SiON using two cascaded-microring resonators

  • Author

    Luping Zhu ; Mingyu Li ; Junjun Ye ; Jian-Jun He

  • Author_Institution
    State Key Lab. of Modern Opt. Instrum., Zhejiang Univ., Hangzhou, China
  • fYear
    2012
  • fDate
    7-10 Nov. 2012
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A waveguide sensor using two cascaded micro-ring resonators based on silicon oxynitride (SiON) waveguide was investigated. The refractive index change of 2.9×10-7 can be measured through intensity interrogation with a low-cost broadband light source.
  • Keywords
    integrated optics; micro-optics; optical resonators; optical sensors; optical waveguides; refractive index; silicon compounds; SiON; broadband light source; cascaded-microring resonators; highly-sensitive optical waveguide sensor; intensity interrogation; refractive index change; silicon oxynitride waveguide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Communications and Photonics Conference (ACP), 2012 Asia
  • Conference_Location
    Guangzhou
  • ISSN
    2162-108X
  • Print_ISBN
    978-1-4673-6274-0
  • Type

    conf

  • Filename
    6510871