DocumentCode
2095695
Title
Highly-sensitive optical waveguide sensor based on SiON using two cascaded-microring resonators
Author
Luping Zhu ; Mingyu Li ; Junjun Ye ; Jian-Jun He
Author_Institution
State Key Lab. of Modern Opt. Instrum., Zhejiang Univ., Hangzhou, China
fYear
2012
fDate
7-10 Nov. 2012
Firstpage
1
Lastpage
3
Abstract
A waveguide sensor using two cascaded micro-ring resonators based on silicon oxynitride (SiON) waveguide was investigated. The refractive index change of 2.9×10-7 can be measured through intensity interrogation with a low-cost broadband light source.
Keywords
integrated optics; micro-optics; optical resonators; optical sensors; optical waveguides; refractive index; silicon compounds; SiON; broadband light source; cascaded-microring resonators; highly-sensitive optical waveguide sensor; intensity interrogation; refractive index change; silicon oxynitride waveguide;
fLanguage
English
Publisher
ieee
Conference_Titel
Communications and Photonics Conference (ACP), 2012 Asia
Conference_Location
Guangzhou
ISSN
2162-108X
Print_ISBN
978-1-4673-6274-0
Type
conf
Filename
6510871
Link To Document