DocumentCode
2095714
Title
Silicon nanowire waveguide sensor based on two cascaded ring resonators
Author
Xianxin Jiang ; Lei Jin ; Mingyu Li ; Jian-Jun He
Author_Institution
Dept. of Opt. Eng., Zhejiang Univ., Hangzhou, China
fYear
2012
fDate
7-10 Nov. 2012
Firstpage
1
Lastpage
3
Abstract
We report the latest experimental results of cascaded double ring sensor. To improve the sensitivity, nanowire waveguide sensor operating in TM polarization is designed and fabricated, with the help of the e-beam lithography system. The measured transmission spectrum shows good agreement with theoretical analysis.
Keywords
electron beam lithography; integrated optics; nanofabrication; nanophotonics; nanosensors; nanowires; optical design techniques; optical fabrication; optical resonators; optical sensors; optical waveguides; silicon; Si; TM polarization; cascaded ring resonators; e-beam lithography; optical design; optical fabrication; sensitivity; silicon nanowire waveguide sensor; transmission spectrum;
fLanguage
English
Publisher
ieee
Conference_Titel
Communications and Photonics Conference (ACP), 2012 Asia
Conference_Location
Guangzhou
ISSN
2162-108X
Print_ISBN
978-1-4673-6274-0
Type
conf
Filename
6510872
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