Hybrid nanorobotic approaches for fabricating NEMS from 3D helical nanostructures

Author

Dong, Lixin ; Zhang, Li ; Bell, Dominik J. ; Nelson, Bradley J. ; Grützmacher, Detlev

Author_Institution

Inst. of Robotics & Intelligent Syst., ETH Zurich

fYear

2006

fDate

15-19 May 2006

Firstpage

1396

Lastpage

1401

Abstract

Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from SiGe/Si/Cr nanocoils and Si/Cr nanospirals is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives

Keywords

chromium; germanium compounds; microactuators; microrobots; microsensors; nanoelectronics; silicon compounds; 3D helical nanostructures; NEMS; Si-Cr nanospirals; SiGe-Si-Cr; SiGe-Si-Cr nanocoils; hybrid nanorobotic; nanoactuators; nanoelectromechanical systems; nanofabrication processes; nanosensors; robotic manipulation; Chromium; Fabrication; Intelligent robots; Nanoelectromechanical systems; Nanofabrication; Nanomaterials; Nanostructures; Nanotechnology; Noise measurement; Robotic assembly;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Automation, 2006. ICRA 2006. Proceedings 2006 IEEE International Conference on

Conference_Location

Orlando, FL

ISSN

1050-4729

Print_ISBN

0-7803-9505-0

Type

conf

DOI

10.1109/ROBOT.2006.1641904

Filename

1641904