DocumentCode
2100589
Title
Spectrometer-on-a-chip based on echelle diffraction grating in SiON waveguides
Author
Xiao Ma ; Mingyu Li ; Jian-Jun He
Author_Institution
State Key Lab. of Modern Opt. Instrum., Zhejiang Univ., Hangzhou, China
fYear
2011
fDate
13-16 Nov. 2011
Firstpage
1
Lastpage
2
Abstract
We demonstrate a spectrometer-on-a-chip based on echelle diffraction grating (EDG) in silicon oxynitride (SiON) waveguides for operation in 850nm wavelength range. The chip comprises 120 output waveguides with 0.25 nm spacing and has a size of only 11mm×6mm. The measured adjacent channel crosstalk is close to 30 dB, the 3dB channel bandwidth is ≪ 0.1 nm and the channel non-uniformity is 3dB for wavelength from 838nm to 852nm.
Keywords
diffraction gratings; integrated optics; optical waveguides; silicon compounds; spectrometers; SiON; adjacent channel crosstalk; channel bandwidth; channel nonuniformity; echelle diffraction grating; silicon oxynitride waveguides; size 11 mm; size 6 mm; spectrometer-on-a-chip; wavelength 838 nm to 852 nm; SiON waveguides; echelle grating; planar waveguide grating; sensing; spectrometer-on-a-chip;
fLanguage
English
Publisher
ieee
Conference_Titel
Communications and Photonics Conference and Exhibition, 2011. ACP. Asia
Conference_Location
Shanghai
ISSN
2162-108X
Print_ISBN
978-0-8194-8961-6
Type
conf
Filename
6511076
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