DocumentCode
2102980
Title
Formation of SiC nanostructures on Si surface using C60 by spinning technique
Author
Mondal, Aniruddha ; Jadav, Nilesh ; Das, Utpal
Author_Institution
Dept. of Electr. Eng., Indian Inst. of Technol. Kanpur, Kanpur
fYear
2008
fDate
22-24 Dec. 2008
Firstpage
28
Lastpage
35
Abstract
SiC nanocrystals growth through the surface reaction between spin-on C60 dissolved in Carbon Disulphide (CS2) and Si substrate and 800degC (100 rains.) annealed has been investigated. Scanning Electron and Atomic Force Microscopy showed the crests of C60 clusters formed preferentially on the Si substrate steps with 40-60 nm cluster sizes. Silicon carbide nanocrystallite formation after anneal. has been confirmed by X-ray diffraction measurements through the most dominant is the 3C-SiC formed, 6H-SiC in some cases has been formed to be equally dominant showed a monotonic fall in the peak intensities with increasing temperature from 16 K to 300 K. The 416 nm peak at 300 K originating from 6H-SiC is the strongest observed. A simple low cost technique has been developed for SiC nanocrystallite growth on Si suitable for light emission.
Keywords
X-ray diffraction; annealing; atomic force microscopy; nanostructured materials; nanotechnology; scanning electron microscopy; semiconductor growth; silicon compounds; surface chemistry; wide band gap semiconductors; Si; SiC; X-ray diffraction; annealing; atomic force microscopy; light emission; nanocrystallite; nanocrystals; nanostructures; scanning electron microscopy; spinning technique; surface reaction; temperature 16 K to 300 K; temperature 800 degC; time 100 min; Annealing; Atomic force microscopy; Atomic measurements; Nanocrystals; Nanostructures; Rain; Scanning electron microscopy; Silicon carbide; Temperature; X-ray diffraction;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Optoelectronic Materials and Devices, 2008. AOMD 2008. 2nd National Workshop on
Conference_Location
Varanasi
Print_ISBN
978-0-230-63718-4
Type
conf
Filename
5075686
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