DocumentCode
2104225
Title
SEM/SThM-hybrid-system: a new tool for advanced thermal analysis of electronic devices
Author
Altes, A. ; Joachimsthaler, I. ; Zimmermann, G. ; Heiderhoff, R. ; Balk, L.J.
Author_Institution
Lehrstuhl fur Elektron., Bergische Univ. Wuppertal, Germany
fYear
2002
fDate
2002
Firstpage
196
Lastpage
200
Abstract
A resistive probe based Scanning Thermal Microscope (SThM) was implemented in an analysis chamber of a Scanning Electron Microscope (SEM). By means of this hybrid-system thermal device, specific characteristics are detectable. Variable punctual heat sources can be simulated and the influence of ambient parameters can be investigated.
Keywords
failure analysis; scanning electron microscopes; thermal analysis; SEM/SThM hybrid system; electronic device; failure analysis; resistive probe; scanning electron microscope; scanning thermal microscope; thermal analysis; Bridge circuits; Failure analysis; Integrated circuit measurements; Platinum; Probes; Scanning electron microscopy; Temperature distribution; Thermal conductivity; Thermal resistance; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits, 2002. IPFA 2002. Proceedings of the 9th International Symposium on the
Print_ISBN
0-7803-7416-9
Type
conf
DOI
10.1109/IPFA.2002.1025657
Filename
1025657
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