Parylene-coated metal tracks for neural electrode arrays - Fabrication approaches and improvements utilizing different laser systems

In the past we developed a method for the fabrication of neural electrodes based on laser-structuring metal foil to form tracks and electrode sites within a silicone rubber substrate. Here, this process was refined by an additional coating of the laser-patterned metal tracks to improve their mechanical properties. Parylene C has been found to be the coating material of choice due to excellent electrical and mechanical characteristics and its well known biocompatibility. An almost ten times increased tensile strength compared to uncoated tracks could be achieved. Investigating the electrical properties of parylene C and silicone rubber attested both materials excellent insulating capabilities by withstanding voltages of more than 400 V_DC for layer thicknesses as intended to be used in electrode array fabrication (some 10 μm). This paper outlines the feasibility of the manufacturing process using a 1064 nm Nd:YAG laser in the nanosecond pulse regime. However, an improvement of the whole processing was demonstrated when a 355 nm Nd:YVO₄ laser in the picosecond regime is used. Benefits of this short pulse duration range from ablating materials independent of their optical properties to increased manufacturing speed and superior processing quality.