• DocumentCode
    2108186
  • Title

    Simulation Of ULSI Silicon MOSFETs

  • Author

    Pinto, M.R. ; Bude, J. ; Rafferty, C.S.

  • Author_Institution
    AT&T Bell Laboratories
  • fYear
    1993
  • fDate
    14-15 May 1993
  • Firstpage
    22
  • Lastpage
    25
  • Keywords
    Boron; Computational modeling; Implants; MOS devices; MOSFETs; Predictive models; Semiconductor process modeling; Silicon; Tunneling; Ultra large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
  • Print_ISBN
    0-7803-1338-0
  • Type

    conf

  • DOI
    10.1109/VPAD.1993.724707
  • Filename
    724707
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2108186