• DocumentCode
    2112365
  • Title

    A Simulation Strategy For Process Optimization

  • Author

    De Meyer, Kristin M. ; Cartuyvels, Rudi ; Dupas, Luc

  • Author_Institution
    IMEC
  • fYear
    1993
  • fDate
    14-15 May 1993
  • Firstpage
    80
  • Lastpage
    83
  • Keywords
    CMOS process; Circuit simulation; Fluctuations; Input variables; Process design; Response surface methodology; Robustness; Software performance; US Department of Energy; Ultra large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
  • Print_ISBN
    0-7803-1338-0
  • Type

    conf

  • DOI
    10.1109/VPAD.1993.724730
  • Filename
    724730
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2112365