• DocumentCode
    2112588
  • Title

    Efficient Mmtidbiensional Sbiulation Of Ion Iwlantation Into Multilayer Structures

  • Author

    Lorenz, J. ; Wierzbicki, R.J.

  • Author_Institution
    Fraunhofer-Arbeitsgruppe fuer Integrierte Schaltungen
  • fYear
    1993
  • fDate
    14-15 May 1993
  • Firstpage
    84
  • Lastpage
    85
  • Keywords
    Adaptive control; Analytical models; Boron; Error correction; Interpolation; Ion implantation; Mesh generation; Nonhomogeneous media; Programmable control; Surface topography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
  • Print_ISBN
    0-7803-1338-0
  • Type

    conf

  • DOI
    10.1109/VPAD.1993.724731
  • Filename
    724731
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2112588