DocumentCode
2113859
Title
Advanced sensor development by MNX
Author
Binger, David ; Ozgur, Mehmet ; Pedersen, Michael ; Sunal, Paul ; Oh, Lance ; Masse, Roger ; Short, Thomas ; Brown, Joseph ; Huff, Michael
Author_Institution
MEMS & Nanotechnol. Exchange Corp. for Nat. Res. Initiatives, Reston, VA, USA
fYear
2010
fDate
1-4 Nov. 2010
Firstpage
2671
Lastpage
2674
Abstract
The MEMS and Nanotechnology Exchange (MNX) was established in 1999 with support from the Defense Advanced Research Projects Agency (DARPA) as an implementation service for the United States R&D community. The overriding goal of the MNX is to provide maximum design and fabrication freedom, which is extremely important for enabling high performance and innovation in the development of MEMS sensors. This paper will provide an overview of the MNX operation and review some of the advanced fabrication technologies made available by the MNX for the implementation of advanced MEMS sensors.
Keywords
microsensors; MEMS and Nanotechnology Exchange; MEMS sensors; MNX; advanced fabrication technologies; advanced sensor development;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2010 IEEE
Conference_Location
Kona, HI
ISSN
1930-0395
Print_ISBN
978-1-4244-8170-5
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2010.5689873
Filename
5689873
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