DocumentCode
2116032
Title
Fabrication of polymer cantilever integrated full-bridge as a piezoresistive sensor
Author
Ahn, Jun-Hyung ; Lee, Dong-Weon
Author_Institution
Grad. Sch. of Mech. Eng., Chonnam Nat. Univ., Gwang-Ju, South Korea
fYear
2010
fDate
1-4 Nov. 2010
Firstpage
1954
Lastpage
1957
Abstract
In this study, we describe the design and fabrication of polymer (SU-8) cantilever with integrated Full-bridge strain sensor. Changes in the surface stress on the SU-8 cantilever are detected by integrated Au strain sensors. Results showed that the full-bridge integrated SU-8 cantilever provides much higher sensitivity than those of conventional type cantilever. The fabricated SU-8 cantilever having the spring constant os 0.2N/m showed a maximum resonance frequency value 5KHZ.
Keywords
cantilevers; microfabrication; microsensors; piezoresistive devices; polymers; strain sensors; frequency 5 kHz; full-bridge integrated SU-8 cantilever; integrated full-bridge strain sensor; maximum resonance frequency; piezoresistive sensor; polymer cantilever fabrication; surface stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2010 IEEE
Conference_Location
Kona, HI
ISSN
1930-0395
Print_ISBN
978-1-4244-8170-5
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2010.5689966
Filename
5689966
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