DocumentCode
2117141
Title
Effects of inserting ultrathin TaOx layer in Pt/TiO2 interface on resistive switching characteristics
Author
Wei, Guobin ; Murakami, Hideki ; Fujioka, Tomohiro ; Ohta, Akio ; Goto, Yuta ; Higashi, Seiichiro ; Miyazaki, Seiichi
Author_Institution
Grad. Sch. of Adv. Sci. of Matter, Hiroshima Univ., Hiroshima, Japan
fYear
2011
fDate
19-20 May 2011
Firstpage
110
Lastpage
111
Abstract
An ultrathin ~1 nm TaOx layer was inserted at the interface between a top Pt electrode and TiO2 as a restive switching dielectric to investigate resistive switching characteristics. A marked change in the initial resistance state and an improvement of the endurance were observed. These results can be interpreted as due to the TaOx layer working as an oxygen reservoir.
Keywords
dielectric materials; switches; Pt-TiO2; Pt/TiO2 interface; initial resistance state; oxygen reservoir; resistive switching characteristics; switching dielectric; ultrathin TaOx layer; Bonding; Dielectrics; Electrodes; Nonvolatile memory; Reservoirs; Resistance; Switches; redox reaction; stack structure; tantalum oxide; titanium oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Future of Electron Devices, Kansai, (IMFEDK), 2011 International Meeting for
Conference_Location
Osaka
Print_ISBN
978-1-61284-145-8
Electronic_ISBN
978-1-61284-147-2
Type
conf
DOI
10.1109/IMFEDK.2011.5944869
Filename
5944869
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