• DocumentCode
    2121371
  • Title

    Non-universal Roll-off Of MOSFET Mobility And VDS Effect In Mobility Measurement

  • Author

    Nishinohara, K. ; Tanimoto, H. ; Konishi, N. ; Takagi, S. ; Shigyo, N.

  • Author_Institution
    Toshiba Corporation
  • fYear
    1993
  • fDate
    14-15 May 1993
  • Firstpage
    176
  • Lastpage
    177
  • Keywords
    Charge carrier density; Current measurement; Electric variables; Ellipsometry; MOSFET circuits; Measurement errors; Research and development; Scattering; Threshold voltage; Ultra large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
  • Print_ISBN
    0-7803-1338-0
  • Type

    conf

  • DOI
    10.1109/VPAD.1993.724776
  • Filename
    724776
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2121371