Trimethylamine detection using microcantilever chemical sensors functionalized with a self-assembled monolayer

Author

Yang, Rui ; Zhou, Youzheng ; Wang, Zheyao ; Liu, Litian

Author_Institution

Inst. of Microelectron., Tsinghua Univ., Beijing, China

fYear

2010

fDate

1-4 Nov. 2010

Firstpage

346

Lastpage

349

Abstract

We report the detection of gas phase trimethylamine (TMA) using a microcantilever chemical sensor (MCS). The MCS is made from silicon-on-insulator (SOI) wafers and consists of two silicon dioxide layers and a single-crystalline-silicon piezoresistor sandwiched in-between. The MCS surface is chemically functionalized with a self-assembled monolayer (SAM) of 11-mercaptoundecanoic acid (11-MUA) via Au-SH covalent bonding on the microcantilever. The 11-MUA SAM adsorbs TMA through hydrogen bonding between the SAM and TMA molecules, resulting in the microcantilever deflection caused by the changes in the surface stress as a result of the hydrogen bonding based chemisorption. The limit of detection (LoD) 1.65 μg/L (0.6 ppm) is achieved.

Keywords

bonds (chemical); cantilevers; gas sensors; microsensors; monolayers; organic compounds; self-assembly; 11-mercaptoundecanoic acid; MCS surface; TMA molecule; chemisorption; covalent bonding; gas phase trimethylamine detection; hydrogen bonding; microcantilever chemical sensor; self-assembled monolayer; silicon dioxide layer; silicon-on-insulator wafer; single-crystalline-silicon piezoresistor; surface stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2010 IEEE

Conference_Location

Kona, HI

ISSN

1930-0395

Print_ISBN

978-1-4244-8170-5

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2010.5690252

Filename

5690252