DocumentCode
2131768
Title
MEMS microhotplate temperature sensor BIST: Importance and applications
Author
Afridi, M. Yaqub ; Geist, Jon
Author_Institution
Semicond. Electron. Div., Nat. Inst. of Stand. & Technol. (NIST), Gaithersburg, MD, USA
fYear
2010
fDate
1-4 Nov. 2010
Firstpage
2159
Lastpage
2160
Abstract
This paper describe the importance of temperature sensor built-in self test (BIST) for microhotplate-based sensors. It shows possible ways to implement BIST functionality for microhotplate temperature sensors, including resistance temperature detectors (RTD), microhotplate thermal efficiency, and Thermocouples. A calibration technique is discussed and conclusions are given.
Keywords
built-in self test; temperature sensors; thermocouples; BIST; MEMS; microhotplate temperature sensor; microhotplate thermal efficiency; resistance temperature detectors; thermocouples;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2010 IEEE
Conference_Location
Kona, HI
ISSN
1930-0395
Print_ISBN
978-1-4244-8170-5
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2010.5690549
Filename
5690549
Link To Document