Electrical calibration of spring-mass MEMS capacitive accelerometers

Testing and calibration of MEMS devices require physical stimulus, which results in the need for specialized test equipment and thus high test cost. It has been shown for various types of sensors that electrical stimulation can be used to facilitate lower cost calibration. In this paper, we present an electrical stimulus based test and calibration technique for overdamped spring-mass capacitive accelerometers which require the characterization of stationary and dynamic calibration coefficients. We show that these two coefficients can be electrically obtained.