DocumentCode
2146614
Title
Photomasks and the enablement of circuit design complexity
Author
Buck, Peter ; Kalk, Franklin ; West, Craig
fYear
2010
fDate
22-24 March 2010
Firstpage
103
Lastpage
107
Abstract
Photomasks have evolved from simple replicators of design layout for lithography to become complex translators of design intent for sub-wavelength imaging systems while at the same time maintaining a cost efficiency that exceeds Moore´s Law predictions for scalability in the semiconductor industry. The cost performance of photomasks is reviewed in context to design costs. The life cycle of a photomask product node is examined with respect to capital investment costs. Predictions for future photomask cost challenges are considered.
Keywords
circuit complexity; integrated circuit economics; integrated circuit layout; investment; life cycle costing; lithography; masks; program interpreters; Moore´s law predictions; capital investment costs; circuit design complexity; complex translators; cost efficiency; cost performance; design costs; design layout; lithography; photomask product node life cycle; photomasks; semiconductor industry; subwavelength imaging systems; Circuit synthesis; Costs; Electronics industry; Etching; Lithography; Moore´s Law; Optical design; Optical distortion; Optical imaging; Substrates; Photomask; mask;
fLanguage
English
Publisher
ieee
Conference_Titel
Quality Electronic Design (ISQED), 2010 11th International Symposium on
Conference_Location
San Jose, CA
ISSN
1948-3287
Print_ISBN
978-1-4244-6454-8
Type
conf
DOI
10.1109/ISQED.2010.5450555
Filename
5450555
Link To Document