• DocumentCode
    2146614
  • Title

    Photomasks and the enablement of circuit design complexity

  • Author

    Buck, Peter ; Kalk, Franklin ; West, Craig

  • fYear
    2010
  • fDate
    22-24 March 2010
  • Firstpage
    103
  • Lastpage
    107
  • Abstract
    Photomasks have evolved from simple replicators of design layout for lithography to become complex translators of design intent for sub-wavelength imaging systems while at the same time maintaining a cost efficiency that exceeds Moore´s Law predictions for scalability in the semiconductor industry. The cost performance of photomasks is reviewed in context to design costs. The life cycle of a photomask product node is examined with respect to capital investment costs. Predictions for future photomask cost challenges are considered.
  • Keywords
    circuit complexity; integrated circuit economics; integrated circuit layout; investment; life cycle costing; lithography; masks; program interpreters; Moore´s law predictions; capital investment costs; circuit design complexity; complex translators; cost efficiency; cost performance; design costs; design layout; lithography; photomask product node life cycle; photomasks; semiconductor industry; subwavelength imaging systems; Circuit synthesis; Costs; Electronics industry; Etching; Lithography; Moore´s Law; Optical design; Optical distortion; Optical imaging; Substrates; Photomask; mask;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quality Electronic Design (ISQED), 2010 11th International Symposium on
  • Conference_Location
    San Jose, CA
  • ISSN
    1948-3287
  • Print_ISBN
    978-1-4244-6454-8
  • Type

    conf

  • DOI
    10.1109/ISQED.2010.5450555
  • Filename
    5450555