DocumentCode
2146967
Title
Design of Micromachined RF Switch
Author
Chen, Shuguang ; Suzuki, Kenichiro ; Marumoto, Tsunehisa ; Ara, Youichi ; Iwata, Ryuichi
Author_Institution
Microwave and Satellite Communications Division, NEC Corporation, 4035, Ikebe-Cho, Tsuzuki-ku, Yokohama 224-8555, Japan
Volume
2
fYear
1999
fDate
Oct. 1999
Firstpage
49
Lastpage
52
Abstract
The switch contact design of mechanical micromachined switches on the standpoint of the tradeoff between the return loss in the "On" state and the isolation in the "Off" state is discussed. The electrical characteristics of the switch fabricated on a glass substrate were measured from 1GHz to 30GHz. Insertion loss less than 0.3dB and return loss less than ¿15dB at 30GHz were obtained.
Keywords
Communication switching; Contacts; Electrodes; Glass; Insertion loss; Insulation; Microstrip; Radio frequency; Substrates; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 1999. 29th European
Conference_Location
Munich, Germany
Type
conf
DOI
10.1109/EUMA.1999.338406
Filename
4139435
Link To Document