DocumentCode
2149616
Title
Comparing the Accuracy and Repeatability of On-Wafer Calibration Techniques to 110GHz
Author
Lord, Anthony J
Author_Institution
Cascade Microtech Europe Ltd, 3 Somerville Court Banbury Business Park, Adderbury, Oxfordshire, UK. anthony.lord@cmicro.com
Volume
3
fYear
1999
fDate
Oct. 1999
Firstpage
28
Lastpage
31
Abstract
Many methods of making corrected S-Parameters measurements are available for on-wafer devices and circuits. This is a comparative study of calibration techniques, presented as most accurate and repeatable for making on-wafer measurements.
Keywords
Aerospace industry; Calibration; Circuits; Frequency; Measurement standards; Microwave measurements; NIST; Performance evaluation; Reflection; Software measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 1999. 29th European
Conference_Location
Munich, Germany
Type
conf
DOI
10.1109/EUMA.1999.338519
Filename
4139542
Link To Document