DocumentCode
2153853
Title
Recent advances in UV and VUV cleaning of optical materials
Author
Kane, D.M. ; Fernandes, A.J. ; Hirschausen, D. ; Pleasants, S. ; Ward, B.K.
Author_Institution
Dept. of Phys., Macquarie Univ., Sydney, NSW, Australia
fYear
2002
fDate
11-13 Dec. 2002
Firstpage
205
Lastpage
208
Abstract
An overview is given of recent achievements of the Materials Processing Branch of the Short Wavelengths and Interactions with Materials (SWIM) program at Macquarie University. This research focuses on using short-pulsed UV lasers and other novel VUV sources to clean small particles (including sub-micron particles) and hydrocarbons from optical, optoelectronic and photonic materials.
Keywords
high-speed optical techniques; laser materials processing; optical materials; surface cleaning; Macquarie University; Materials Processing Branch; Short Wavelengths and Interactions with Materials program; VUV cleaning; VUV sources; hydrocarbons; optical materials; optoelectronic materials; photonic materials; short pulsed UV lasers; small particles cleaning; submicron particles; Chemical lasers; Cleaning; Glass; Laser ablation; Laser beams; Laser theory; Optical attenuators; Optical materials; Optical microscopy; Optical pulses;
fLanguage
English
Publisher
ieee
Conference_Titel
Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on
ISSN
1097-2137
Print_ISBN
0-7803-7571-8
Type
conf
DOI
10.1109/COMMAD.2002.1237228
Filename
1237228
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