DocumentCode
2153926
Title
Electric conductimetric sensor with a thin-layer structure for moisture analysis
Author
Mitsubayashi, Kohji ; Miyoshi, Yoko ; Takeuchi, Toshifumi ; Karube, I.
Author_Institution
Dept. of Human & Inf. Sci., Tokai Univ., Kanagawa, Japan
fYear
2002
fDate
11-13 Dec. 2002
Firstpage
217
Lastpage
220
Abstract
An electric conductimetric sensor (thickness: 80 μm) constructed in a sandwich configuration with a hydrophilic poly-tetrafluoroethylene membrane placed between two gold deposited layers was evaluated for use as a moisture sensor. The humidity level was measured by electrical conductivity of the device using the Multi-frequency LCR-meter at frequencies ranging from 100 Hz to 100 k Hz, the device was calibrated at 100 Hz against the moisture air over the range of 30-85 % RH, which includes normal humidity level in the atmosphere and physiologic air such as breath and sweating. The response sensitivity of the conductimetric device was extremely high (i.e. less than 1 sec. for conductivity shift between humid air of 80 % RH and dried air of -60 °C dew point) even for recovery to dried air. The sensor performance was reproducible over multiple measurements, showing the highly reproducibility with a coefficient of variation of 1.77 % (n = 5).
Keywords
electric sensing devices; electrical conductivity; gas sensors; humidity; humidity measurement; humidity sensors; organic compounds; -60 degC; 100 Hz to 100 kHz; 80 % RH; 80 mum; Multi-frequency LCR-meter; breath; coefficient of variation; conductimetric device; conductivity shift; dried air; electric conductimetric sensor; electrical conductivity; gold deposited layers; humid air; humidity level; hydrophilic poly-tetrafluoroethylene membrane; moisture air; moisture analysis; moisture sensor; multiple measurements; normal humidity level; physiologic air; response sensitivity; sandwich configuration; sensor performance; sweating; thin-layer structure; Atmosphere; Atmospheric measurements; Biomembranes; Conductivity measurement; Electric variables measurement; Frequency measurement; Gold; Humidity measurement; Moisture measurement; Reproducibility of results;
fLanguage
English
Publisher
ieee
Conference_Titel
Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on
ISSN
1097-2137
Print_ISBN
0-7803-7571-8
Type
conf
DOI
10.1109/COMMAD.2002.1237231
Filename
1237231
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