Novel Fabrication Technique of Proton-exchanged Waveguide Based on LiNbO3 Using Inductively Coupled Plasma

The paper reports on a novel process, in which a high ICP source power was used in order to generate high density hydrogen plasmas. The samples were placed on the lower electrode set at a process temperature and a small RF power was applied to the lower electrode to generate the necessary self bias voltage attracting the H⁺ ions onto the surface of the sample. Thus, the ICP PE techniques are particularly suitable for fabrication of high optical quality, single low order crystallographic phase, and accurately controlled waveguides on substrates, in particular those unable to be immersed into melting acid.