• DocumentCode
    2156923
  • Title

    3-D microinductor fabricated by using MEMS technology

  • Author

    Fang, Dong-Ming ; Zhang, Hai-Xia ; Zha, Xiao-Lin

  • Author_Institution
    Inst. of Microelectron., Peking Univ., Beijing, China
  • fYear
    2008
  • fDate
    20-23 Oct. 2008
  • Firstpage
    2484
  • Lastpage
    2487
  • Abstract
    A high-performance three-dimensional (3-D) microinductor was fabricated by using MEMS technology. This inductor has an air core and copper coils. The measurement results show that this inductor has high quality (Q) factor over wide range of operating frequency and high fres (self-resonant frequency). The maximum Q-factor of this inductor is 38 (@6 GHz) and the inductance is 1.81 nH at peak-Q frequency.
  • Keywords
    Q-factor; inductors; micromechanical devices; MEMS technology; Q-factor; air core; copper coils; three-dimensional microinductor; Coils; Conductors; Fabrication; Inductance; Inductors; Magnetic cores; Micromechanical devices; Q factor; Radio frequency; Solenoids;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4244-2185-5
  • Electronic_ISBN
    978-1-4244-2186-2
  • Type

    conf

  • DOI
    10.1109/ICSICT.2008.4735095
  • Filename
    4735095
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2156923