DocumentCode
2163234
Title
Polymer optical MEMS integrated on VCSELs for biosensing
Author
Bardinal, Veronique ; Camps, Thierry ; Reig, Benjamin ; Doucet, Jean-Baptiste ; Abada, Sami ; Daran, Emmanuelle
Author_Institution
LAAS, Toulouse, France
fYear
2013
fDate
18-22 Aug. 2013
Firstpage
47
Lastpage
48
Abstract
We present our recent advances on design and fabrication of polymer optical MEMS that can be directly integrated on VCSELs arrays for dynamic beam focusing. These studies open new insights for the fabrication of compact optical sensors that require a real-time scan of laser beam position.
Keywords
bioMEMS; biosensors; microfabrication; microsensors; optical polymers; optical sensors; surface emitting lasers; two-dimensional digital filters; VCSELS; biosensing; compact optical sensor fabrication; dynamic beam focusing; integrated polymer optical MEMS; laser beam position; polymer optical MEMS design; polymer optical MEMS fabrication; real-time scan; vertical-cavity surface-emitting lasers; Biomedical optical imaging; Micromechanical devices; Optical device fabrication; Optical polymers; Optical sensors; Vertical cavity surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location
Kanazawa
ISSN
2160-5033
Print_ISBN
978-1-4799-1512-5
Type
conf
DOI
10.1109/OMN.2013.6659052
Filename
6659052
Link To Document